多阶柱状微电极加工模型及试验研究

刘勇;曾永彬;余宏兵;朱荻

Theoretical and Experimental Research on Fabrication of Multiple Stepped Cylindrical Micro Electrode

LIU Yong;ZENG Yongbin;YU Hongbing;ZHU Di

. 2011, (17): 164 -171 .