基于SU-8厚胶光刻工艺的微电铸铸层尺寸精度控制新方法
刘冲;李苗苗;施维枝;杜立群;王立鼎
New Method for Dimensional Precision Control of Electroformed Parts by Using Micro Electroforming Technique with SU-8 Thick Photoresist
LIU Chong;LI Miaomiao;SHI Weizhi;DU Liqun;WANG Liding
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2011, (3): 179
-185
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