• CN：11-2187/TH
  • ISSN：0577-6686
机械工程学报

机械工程学报 ›› 2016, Vol. 52 ›› Issue (17): 72-77.doi: 10.3901/JME.2016.17.072

• 精密加工制造技术专栏 • 上一篇    下一篇

扫码分享

F-Theta自由曲面透镜的精密与镜面磨削*

谢晋1, 孙晋祥1, 黎宇弘1, 李青1, 李楠2   

  1. 1. 华南理工大学机械与汽车工程学院 广州 510640；
    2. 天津航海仪器研究所 天津 300131
  • 出版日期:2016-09-05 发布日期:2016-09-05
  • 作者简介:谢晋，男，1963年出生，博士，教授，博士研究生导师。主要研究方向为磨削加工、微细加工和精密加工。

    E-mail：jinxie@scut.edu.cn

  • 基金资助:
    * 国家自然科学基金(61475046)、广东省自然科学基金重点(2015A030311015)和广东省科技计划(2014B010104003)资助项目; 20151021收到初稿，20160410收到修改稿;

Precision and Mirror Grinding of F-Theta Freeform Surface Lens

XIE Jin1, SUN Jinxiang1, LI Yuhong1, LI Qing1, LI Nan2   

  1. 1. School of Mechanical and Automotive Engineering， South China University of Technology， Guangzhou 510640；
    2. Tianjin Navigation Instrument Research Institute， Tianjin 300131
  • Online:2016-09-05 Published:2016-09-05

摘要：

针对光学玻璃的F-Theta自由曲面透镜加工困难等问题，提出将金刚石砂轮的椭圆环面代替圆环面，进行F-Theta自由曲面磨削加工，研究形状误差的补偿磨削方法和光学玻璃的镜面磨削工艺。根据F-Theta透镜的自由曲面建立砂轮与工件相切的刀具轨迹法向算法。采用#46粗金刚石砂轮修整成椭圆环面，提出自由曲面磨削的法向误差补偿加工模式。最后，采用#3000超细金刚石砂轮的椭圆环面进行轴向磨削试验。试验结果表明：传统的垂直误差补偿磨削可减小面形误差45.9%及其PV值11.6%;而新提出的法向误差补偿磨削可减小面形误差47.9%及其PV值41.5%。此外，超细砂轮磨削可使得自由曲面的粗糙度达到28 nm，其镜面磨削工艺有别于较粗砂轮磨削工艺。因此，椭圆环面砂轮的法向补偿磨削是提高自由曲面加工精度的有效方法，而且，无需研磨抛光就可以实现光学玻璃的自由曲面镜面磨削。

关键词: 金刚石砂轮, 精密磨削, 镜面磨削, 误差补偿, 自由曲面, F-Theta透镜

Abstract:

Due to the processing difficulties of optical glass F-Theta freeform surface lens, the form error compensation and the mirror grinding processes of freeform surface using an elliptical grinding wheel instead of the arc one are proposed. The F-Theta freeform surface lens is designed by equation, and a normal algorithm model for planning tool paths of freeform grinding is proposed. Second, the form error compensation is employed to grinding F-Theta freeform surface lens with an elliptical torus-shaped #46 diamond grinding wheel, which includes the vertical from error and normal form error compensation. An elliptical torus-shaped #3000 diamond grinding wheel is employed to grind F-Theta freeform surface lens to study the mirror grinding process. Experimental results show that the vertical form errorsEy and PV of F-Theta freeform surface lens are decreased by 45.9% and 11.6% after traditional vertical form errors compensation, respectively; The normal form errorsEn and PV of F-Theta freeform surface lens are decreased by 47.9% and 41.5% after the new proposed normal form error compensation, respectively; Besides, The roughness of F-Theta freeform surface lens ground by #3000 diamond grinding wheel is 28 nm, and its mirror grinding process is different from the coarse grinding process. It is confirmed that normal form error compensation may be an efficient method for precision grinding of freeform surface. In addition, the #3000 elliptical torus-shaped diamond grinding wheel can fabricate mirror optical glass freeform surface lens without polishing.

Key words: diamond grinding wheel, error compensation, freeform surface, mirror grinding, precision grinding, F-Theta lens

版权所有 © 2019 《机械工程学报》编辑部 | 京ICP备05055788号-30