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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Experimental Investigation on Material Removal Process for Micro-grinding of Single Crystal Silicon
CHENG Jun;WANG Chao;WEN Xuelong;YIN Guoqiang;GONG Yadong;SONG Hua
. 2014, (
17
): 194 -200 .
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