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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Numerical Study on the Transient Adjustment of Wafer’s Posture in Chemical Mechanical Planarization
ZHOU Ping;ZHAO Jie;LI Zhiwei;JIN Zhuji;LIU Bin
. 2014, (
1
): 199 -204 .
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