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CN: 11-2187/TH
ISSN: 0577-6686
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中文
Solid Catalysts Based on Fenton Reaction for SiC Wafer in Chemical Mechanical Polishing
XU Shaoping, LU Jiabin, YAN Qiusheng, SONG Tao, PAN Jisheng
Journal of Mechanical Engineering . 2017, (
21
): 167 -173 . DOI: 10.3901/JME.2017.21.167
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