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CN: 11-2187/TH
ISSN: 0577-6686
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Magnetic and Discharge Parameter Effects on Argon Ion Transport in Magnetron Sputtering
Tian Qingxu, Zhou Xiao, Gong Mingyu, Zhang Helin, Chen Shuying, Meng Fanchao
Journal of Mechanical Engineering . 2026, (
14
): 207 -219 . DOI: 10.3901/JME.260749
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