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CN: 11-2187/TH
ISSN: 0577-6686
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中文
Study on the Evolution Mechanism of Defects Morphology in Atomic Scale Polishing of LiNbO
3
GUO Jiang, YANG Zhe, XU Haijun, LI Linguang, WANG Dongzhou, ZHANG Pengfei
Journal of Mechanical Engineering . 2025, (
13
): 474 -482 . DOI: 10.3901/JME.2025.13.474
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