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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Non-destructive Measurement and Characterization of Damage Layer of Single-crystal Diamond Substrate after Ultra-precision Machining
LI Ziqing, CUI Zhangcai, BIAN Subiao, LI Huihui, LU Jing, ORIOL Arteaga, XU Xipeng
Journal of Mechanical Engineering . 2024, (
4
): 239 -249 . DOI: 10.3901/JME.2024.04.239
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