• CN: 11-2187/TH
  • ISSN: 0577-6686
Positioning Accuracy Characterization Approach in Micro-scale Displacement for Precise Linear Stage Based on Stream of Variation Theory
TANG Hao, ZHANG Dong, ZHANG He, GAO Guibing, ZHENG Yu
Journal of Mechanical Engineering . 2023, (13): 49 -58 .  DOI: 10.3901/JME.2023.13.049