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CN: 11-2187/TH
ISSN: 0577-6686
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中文
An In-situ Online Micro-nano Structure Read-write Method Based on Scanning Probe
LIAO Xiaobo, ZHUANG Jian, DENG Yalou, WANG Zhiwu, JIAOYANG Bohan, CAI Yong, LIAO Xuan
Journal of Mechanical Engineering . 2021, (
5
): 148 -156 . DOI: 10.3901/JME.2021.05.148
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