• CN: 11-2187/TH
  • ISSN: 0577-6686
Research Progress in Machining Technology of Nanohole Arrays
ZHANG Pengcheng, WEN Qiuling, JIANG Feng, SHEN Shaoxin, LU Jing
Journal of Mechanical Engineering . 2020, (9): 223 -233 .  DOI: 10.3901/JME.2020.09.223