Abstract: A process of cryogenic polishing without abrasive is proposed ,which combines abrasiveless polishing and cryogenic polishing. This new process gains super-smooth surface on optical material with angstrom dimension (Ra<1 nm). By various experiments , the effects of water quality of polishing disk , time of modifying ice disk, polishing pressure and eccentricity on surface roughness are studied. Results show that this process can reach surface roughness with angstrom dimension.

Key words: Cryogenic polishing, Optical material, Supersmooth surface, Without abrasive