Abstract: Based on the existing problems of micro-friction in MEMS design, the significance and needs of study on micro-friction are discussed. The progress of research on elemental performances of micro-friction is summarized, including micro-friction in comparison with micro-friction, relation between micro-friction with surface topography and mechanism of stick-slip. The main research directions for controlling micro-friction properties are proposed as well.

Key words: Micro electro-mechanical system, Micro-friction, Performance and control