Abstract: For the realization of high frequency control of the flexure-based micromanipulator, a novel spatial compliant precision positioning stage driven by PZT is designed, and flexure hinge with circular notches and one rotational degree of freedom is utilized to realize the passive adjustment of the three translations of the platform. The position, velocity and acceleration equations are established on the basis of the Pseudo-Rigid-Body model. After calculating the potential energy of the flexure hinges, the inverse dynamic is developed on the principle of virtue work. By the mass matrix and the stiffness matrix, the expression of the natural frequency is derived. Then, the influence of the stiffness of the flexure hinges and the mass on the drive torques are analytically discussed. The model analysis of the stage is carried out by means of ANSYS, a finite element method code. Experiments are conducted to measure the modal frequencies of the stage. The results obtained from experiment, finite element method and formulation are compared to prove the correctness of the established theoretical model and the validity of the numerical analyses.

Key words: Compliant mechanism, Dynamics, Natural frequency, Principle of virtue work