Abstract: LIGA(Lithographie galvanformung and abformug) process is a micro fabrication method that can use various materials to obtain high aspect ratio microstructures. The principle of LIGA techniques and the parameters of LIGA experimental station at NSRL are introduced. The recent progresses in the research of LIGA techniques at NSRL, such as synchrotron radiation lithography, micro-electroforming, micro-molding, and the application of LIGA techniques, such as micro-inerial devices and micro-fluidic devices, are presented in detail. The development status of research and application of LIGA techniques and the problems encountered are analyzed. Some of the prospects of LIGA application are put forward by combining the features of synchrotron radiation lith-graphy

Key words: LIGA technique, Micro-fluidic devices, Micro-molding