Abstract: In order to overcome the shortcomings of current technologies for meso scale manufacturing, such as MEMS and ultra precision machining, meso milling process with miniaturized machine tool is developed. First, the related technologies for the process mechanic research are investigated based on the characteristics of meso milling process. An overview of the key issues is presented and research approaches are proposed as well. Then, the meso machine tool system is developed for the mechanisms research. The subsystems and their specifications are described. Finally, some tests are done to evaluate the sys-tem performance. The tests consist of the positioning subsystem precision measurement, the assessment test for machining pro-cess and the experiments for some machining cases. Through these test analysis, meso milling process is proved to be feasible and applicable

Key words: Meso manufacturing, Meso scale, Milling process, Miniaturized machine tool