Abstract: Using piezo-electrical PVDF (Polyvinilidene fluor- ide) and micro-fork, and combining with tungsten probes respectively, three kinds of surface scanning probe styluses were developed. Cooperating with x-y piezo-electrical driving stage, these new styluses constitute scanning probe microscopes based on the same operating mechanism of the tapping mode AFM. The schematic structures and characteristics of these styluses were introduced, and then the measurement results obtained by the developed system were given. The results proved the effectiveness of the new scanning styluses.

Key words: Micro-fork, PVDF, Scanning probe, SPM, Stylus