Abstract: Following a review of current micro-manipulation technologies of biological particles, a micro-manipulation chip based on the light-induced dielectrophoresis technology is designed. And the key component of the chip (the photoconductive film) is manufactured. Then the pattern of spot manipulation is modeled and simulated in the quasi-static electric field condition. The spot light intensity obeys Gaussian distribution. The size of spot directly influences the distribution of the gradient of the square of electric field. The gradient peak in x-direction of the square of electric field increases along with the decrease of the spot size, and it rapidly reduces along with the increase of the height. Finally, the single-particle manipulation is experimentally confirmed by the light-induced dielectrophoresis testing platform. Results show that the latex beads suspended in the de-ionized (DI) water is operated by the negative dielectrophoresis, when the value (peak-to-peak) of the applied voltage is 20 V and the AC frequency is 1 MHz, and the maximum speed of 50um particle in the spot pattern is 45 μm/s. Under the same condition the movement direction of the single particles can be controlled in the annular virtual electrode model.

Key words: Finite element method, Light-induced dielectrophoresis, Micro-particle manipulation