Abstract: The scanning probe microscope (SPM), which was invented for imaging the surface at the atomic level, is becoming a promising method for nano/micro machining on solid surface. This method may be the main way for fabrication of nano/micro devices in the future. Three machining methods based on SPM are introduced: single atom manipulation, anode oxidation and mechanical nanomachining. Their features, principles and present situation are discussed in detail. And the anode oxidation nanolithography is the important way which may be used in many manufacture fields. While the mechanical nanomachining can not only be applied to nanolithography fields, but also to the research of nanomachining mechanism.

Key words: Anode oxidation, Mechanical nanomachining, Scanning probe microscope, Single atom manipulation