STUDY ON THE FUNDAMENTAL DESIGN ISSUES OF MICRO ELECTROMECHNICAL SYSTEMS (MEMS)

›› 2000, Vol. 36 ›› Issue (7): 39-42.

Wen Shizhu;Ding Jianning

CLC Number:

Wen Shizhu;Ding Jianning. STUDY ON THE FUNDAMENTAL DESIGN ISSUES OF MICRO ELECTROMECHNICAL SYSTEMS (MEMS)[J]. , 2000, 36(7): 39-42.

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[6]	Che Lufeng;Huang Xiaozhen;Xiong Bin;Wang Yuelin. EQUIVALENT ELECTRICAL MODEL OF VIBRATORY MICROMACHINED GYROSCOPE [J]. , 2003, 39(3): 117-120，.
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