Abstract: There is a lack of distributed coordination mechani- sm for semiconductor fabrication line dynamic scheduling status in quo. To resolve this problem, a novel modeling and scheduling technology, ETAEMS/GPGP-CN, for dynamic scheduling of semiconductor fabrication line is proposed. To extend the non-local effect of TAEMS, ETAEMS can be used to quantitatively model and analyze the coordination relatio- nship. Integrating the GPGP for upstream or downstream coo- rdination information and contract net, GPGP-CN algorithm for dynamic scheduling is given. An illustrative example of a 150 mm semiconductor fabrication line in shanghai demonstra- tes the effectiveness of approach.

Key words: Distributed coordination, Dynamic scheduling, Multi-agent, Semiconductor fabrication line