Abstract: Obtaining the macro model of MEMS is the key of MEMS system-level modeling and simulation. The Krylov subspace theory and method are applied to get reduced order model of MEMS, and the theoretical foundation of Krylov subspace is introduced. For the common MEMS coupling with static-electrical and structure, the FEM functions are built, and its reduced order model can be obtained by using modified Arnoldi algorithm. It’s shown from example that the reduced order model describes really the dynamics of the original system, while the computing time and complexity are reduced to a great extent.

Key words: Coupled, FEM, Macro model, MEMS, Subspace