Review of Ultrasonic Vibration-assisted Abrasive Flow Polishing Technology

doi:10.3901/JME.2021.09.233

Abstract

Abstract: Polishing is an important method to achieve the final surface quality requirements of high-performance parts. Ultrasonic vibration assisted abrasive flow polishing (UVAFP) is a compound polishing technology combining abrasive flow polishing technology with ultrasonic vibration technology. It is of unique advantages in the polishing of complex surfaces of hard brittle materials such as optical glass, sapphire, monocrystalline silicon, ceramics and metal parts, which can effectively improve the surface quality and polishing efficiency. The development of this technology in recent years is summarized, and the basic principle of polishing, the micro mechanism of material removal, the classification of polishing process and its application are discussed and analyzed systematically. The current research hotspots and key problems of this technology were pointed out, and suggestions and prospects for the future research, application and development of this technology are proposed.

Key words: ultrasonic vibration, abrasive flow polishing, removal mechanism

CLC Number:

TG663

LI Hua, REN Kun, YIN Zhen, DAI Chenwei, WANG Zhongwang, WEI Li, WEI Dong. Review of Ultrasonic Vibration-assisted Abrasive Flow Polishing Technology[J]. Journal of Mechanical Engineering, 2021, 57(9): 233-253.

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