Abstract: Tunneling effect sensing system is a system for the nanoscale measurement. The design of micro-displacement mechanism has great influence on the performance of the system. The past research on the optimization of the micro-displacement mechanism focused on the single-objective or common multi-objective problem, but there are many attributes need to be optimized which may have different variables and constraints and can hardly be described and solved by single level programming. So the leader-follower optimization of the micro-displacement mechanism is developed. According to the performance requirements the preliminary design of the micro-displacement mechanism consisted of PZT and flexible hinge structure is proposed. Then the leader-follower optimization model composed of the two significant attributes (size and static characteristic) and the cooperation level with common variables are constructed. A bi-level programming numerical method for the engineering application named moving space response surface fitting optimum value function method is proposed. Finally the results are analyzed.

Key words: Bi-level programming, Flexible hinge, Leader-follower optimization design, Micro-displacement mechanism, Response surface method, local relative density mapping, matrix similarity, topology optimization, variable density cellular structure, voxelization