Abstract: The new technologies of rapid prototyping and micro electro mechanical systems (MEMS) and its microfabrication are introduced, and the advantages and disadvantages of some microfabrications based on rapid prototyping and their new progress are contrastively analyzed. For studying the technique of laser-induced selective chemical liquid deposition based on rapid prototyping (LCLD&RP),firstly the whole system principles and craft process are discussed, and its some advantages and disadvantages are pointed out. Some experiments about laser-induced selective chemical deposition of copper on common glass from solution are accomplished, and the point, the line and the thin film of copper are deposited successfully, and the delamination deposition is also realized. According to our initial experimental results, the analyses of deposition principles and reaction principles and the foundation of the model of reaction rates and deposition rates, the feasibility of LCLD&RP’s application on three dimension microfabrication is discussed and demonstrated.

Key words: Micro-parts, Rapid prototyping Laser-induced, Selective chemical deposition Microfabrication