Abstract: There is a lack of distributed coordination mechanism for semiconductor fabrication line scheduling and control status in quo. To resolve this problem, a multi-agent model for short-term global scheduling of semiconductor fabrication line is proposed, and a combination auction based coordination mechanism for multi-object short-term scheduling is given. An illustrative example of a 152 mm semiconductor fabrication line in shanghai demonstrates effectiveness of the approach.

Key words: Combination auction, Semiconductor fabrication line, Short term scheduling, Characterization method, Erosion, Hard coatings, Impact wear, Test device