Abstract: Titanium oxide titanium nitrogen gradient films are prepared on Si, Ti6Al4V and low temperature isotropic carbon(LTIC) by plasma immersion ion implantation and deposition (PIII-D) under three different processes. The pushing of the metal cathode source and the variation of gas composition are controlled by programmable logical control (PLC). The me-chanical properties of the synthesized films are investigated by nano-indentation tests, pin-on-disc wear experiments, and scratch test. The results show that maximum hardness of the gradient films achieves 19.5 Gpa, and the maximum adhesion between films and substrate is 68 N or so. Structure investiga-tion results show that the surface Ti-O layer of the films is rutile structure. The gradient characteristics of the films are supported by qualitative analysis of second ion mass spectroscopy (SIMS). X-ray photoelectron spectra (XPS) analyses the surface of syn-thesized films. The results of XPS show that synthesized films are non-stoichiometric, whose composition are identified as TiO2, Ti2O3 and TiO. Scanning electron microscope (SEM) is used to observed wear trace and scratch trace of the TiN/Ti-O gradient films. The results show that the films have good wear resistance and high adhesion strength.

Key words: Plasma immersion ion implantation(PIII), TiN/Ti-O gradient film, X-ray photoelectron spectra(XPS)