Abstract: Both the theoretical and experimental analyses on several typical micro channels of the micro fluidic systems are presented. The flow patterns of the rigging angle bend channel, the sudden expansive channel and the elbow channel on the pressure driven mode are numerically analyzed by using CFD simulation technology. The simulation method for the electroosmosis is described and the electroosmosis flow inside the cross channel is simulated. Four kinds of micro channel models are micromachined with glass material and experimentally detected by using Micro-PIV technology. A good agreement is obtained by comparing the simulation results with the experimental results. From the results, The Micro-PIV technology is indicated to be the most efficient experimental method for micro flow detection. Furthermore, N-S equation is experimentally proved to be correct in the micron flow numerical simulation.

Key words: CFD Electroosmosis, Micro fluidic system, Micro-PIV