Abstract: In order to improve the efficiency for coupled electromechanical analysis of MEMS system, a new efficient numerical approach for electrostatic MEMS with small deformations is presented. The proposed method combines a linear beam theory for mechanical analysis and a boundary integral formulation for electrostatic analysis. The solution of beam equation is carried out by using the standard mode analysis technique. The boundary equation is carried out by using the boundary element method, and the boundary element equation is expanded in Taylor series to enable performing the analysis on the undeformed geometry of the structures. Comparing with previous methods, when the microstructures undergo small deformations, the surface charge densities on the deformed geometry can be computed without updating the geometry of the microstructures using the new approach, so the computational efficiency for coupled electromechanical analysis is improved effectively. Finally, the approach is validated by comparing its results with those results available in literature and ANSYS software solutions, and is much faster than the previous methods.

Key words: Electromechanical analysis, MEMS Boundary element method, Catalytic combustion, Quasi-period, Rotary period, Rotary regenerative, Low calorific value gas