Abstract: Considering the uncertainty during execution of process model, the performance evaluation and analysis of process model are presented by general stochastic Petri net (GSPN). This methodology describes the basic process characters of activities, states and transitions associated with exponential distribution or other stochastic variables. The capabilities of latency time, utility of resource and throughput of the process model and its subnet are calculated through the solving of steady probability. The result also provides the quantitative functions in reconfiguration of process model and manufacturing system for continuous improvement. Finally a quality assurance workflow model demonstrates the process steps.

Key words: Manufacturing system, Performance simulation, Petri net, Process modeling