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  首页《机械工程学报(英文版)》2008年3期目录EXPERIMENTAL STUDY ON THE HOT EMBOSSING POLYMER MICROFLUIDIC CHIP

HE Yong

FU Jianzhong

CHEN Zichen
College of Mechanical and Energy Engineering,
Zhejiang Unviersity,
Hangzhou 310027, China

 

 

EXPERIMENTAL STUDY ON THE HOT
EMBOSSING POLYMER MICROFLUIDIC CHIP*

 

Abstract: Experiments are used to study the fabrication of polymer microfluidic chip with hot embossing method. The pattern fidelity with respect to the process parameters is analyzed. Experiment results show that the relationship between the imprint temperature and the microchannel width is approximately exponential. However, the depth of micro channel isn’t sensitive to the imprint temperature. When the imprint pressure is larger than 1 MPa and the imprint time is longer than 2 min, the increasing of imprint pressure and holding time has little impact on the microchannel width. So over long holding time is not needed in hot embossing. Based on the experiment analysis, a series of optimization process parameters is obtained and a fine microfluidic chip is fabricated. The electrophoresis separation experiment are used to verify the microfluidic chip performance after bonding. The results show that 100bp-ladder DNA sample can be separated in less than 5 min successfully.

Key words: Microfluidic chip Hot embossing Channel sizes Pattern fidelity

 


* This project is supported by National Hi-tech Research and Development Program of China (863 Program, No. 2002AA421150) and Research Foundation of Doctorial Project of Ministry of Education, China (No. 20030335091). Received June 8, 2007; received in revised form April 10, 2008; accepted April 22, 2008

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Biographical notes

HE Yong is currently a postdoctor in College of Mechanical and Energy Engineering, Zhejiang University, China. He received his PhD degree from Zhejiang University, China, in 2007. His research interests are in the fabrication technology of MEMS and numerical control, etc.
Tel: +86-571-87951907; E-mail: yongqin@zju.edu.cn

FU Jianzhong is currently a professor in Zhejiang University, China. He received his PhD degree from Zhejiang University, China, in 1996. His research interests include micro-electro-mechanical systems(MEMS), thermal deformation and numerical control technology.
Tel: +86-571-87951906; E-mail: fjz@zju.edu.cn

CHEN Zichen is currently a professor in Zhejiang University, China. He received his PhD degree from Zhejiang University, China, in 1989. His research interests include thermal deformation, numerical control technology and micro-electro-mechanical systems(MEMS).


References


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