Research Progress of Vacuum Aerostatic Bearing

doi:10.3901/JME.2025.05.013

Abstract

Abstract: With the development of aerostatic lubrication technology and the urgent need of compatible vacuum working environment, vacuum aerostatic bearing based on sealing design has become one of the hot topics. Because of its advantages of high dynamic, frictionless, high precision, and no pollution, it has a good application prospect in precision machining, measurement and other fields. It provides in detail overview of the research status of vacuum aerostatic bearings both domestically and internationally, including lubrication mechanism, structure optimization, and experiment research. The advantages and disadvantages of vacuum aerostatic bearings compared with traditional aerostatic bearings are compared, and the conventional sealing methods and efficient extraction methods of vacuum aerostatic bearings are summarized. On this basis, the critical technical problems such as support characteristics, structural design, and processing technology that need to be solved in the design of vacuum aerostatic bearings are analysed, and the future development trend of vacuum aerostatic bearings is preliminarily prospected, which provides the corresponding basis for the design of vacuum aerostatic bearings.

Key words: vacuum aerostatic bearing, bearing seal, static characteristic, structure optimization, experiment research

CLC Number:

TH133

WU Jianwei, WANG Jiyao, ZHENG Jian, ZHAO Pengyue, GAO Xifeng, WEN Zhongpu. Research Progress of Vacuum Aerostatic Bearing[J]. Journal of Mechanical Engineering, 2025, 61(5): 13-25.

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