Key Technology and Developing Trend of Ultra-precision Aerostatic Bearing

doi:10.3901/JME.2025.05.001

Abstract

Abstract: Ultra precision measurement refers to accuracy superior to the 100 nm, which is the cornerstone of establishing a national measurement system and a complete manufacturing chain and industrial chain. It is also a necessary condition for the equipment manufacturing industry to leap towards the mid to high end. High end manufacturing equipment typically requires highly integrated optical, mechanical, and electronic control subsystems, as well as thousands of components, at the ultra precision level, and can only be achieved through collaborative work. Among them, the linear/rotational motion benchmark is like the skeleton of the instrument equipment, and its accuracy and performance largely determine the overall accuracy and performance of the instrument equipment. The general accuracy of aerostatic lubrication technology can reach 0.1 μm/100 mm, with the characteristic of low friction and long service life, has become the core technical support for achieving ultra precision measurement. It is outlined that an overview of the structural characteristics and working principles of aerostatic equipment, and puts forward two kinds of contradictions in the methods of improving the performance, as well as their unity. Analyze the characteristics of engineering calculation method, gauge pressure ratio method, gas resistance calculation method, finite element method and other main design methods, and at last summarize the application scope of each method. It looks forward to the development trend of aerostatic technology, points out the specific problems faced by breaking through the existing technical indicators, and gives the solutions to the core problems.

Key words: aerostatic bearing technology, high-precision, design method, performance calculation

CLC Number:

TG47

WEN Zhongpu, SHI Zhaoyao, TAN Jiubin, WU Jianwei, CUI Hailong. Key Technology and Developing Trend of Ultra-precision Aerostatic Bearing[J]. Journal of Mechanical Engineering, 2025, 61(5): 1-12.

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