Fundamental Research on Laser-micro Milling Hybrid Processing of Alumina Co-fired Substrate

doi:10.3901/JME.2024.21.397

Abstract

Abstract: Based on the difficult processing problem of Al₂O₃ HTCC, a hybrid processing method of laser-micro milling is proposed. The morphology, dimensions and mechanical properties of the residual metamorphic layer of nanosecond laser-machined aluminum oxide co-fired substrates are investigated followed by milling tests. The results show that the tightly bound alumina particles form a loose metamorphic layer attached to the substrate surface under laser action. The etching depth of the grooves increases with the increase of laser power and the decrease of scanning speed and filling spacing in different degrees between 170-537 µm, 167-493 µm and 170-303 µm, respectively, while the etching width varies between 515-643 µm. The overall hardness of the residual metamorphic layer of the substrate after laser modification was reduced by 82%-96.2% down to 53.9 HV. Compared to pure milling, the laser-micro-milling resulted in improved tool serviceability, largely intact cutting edges and tool profiles, and a reduction in the post-processing surface roughness by 60%-65% down to 0.204 µm.

Key words: Al₂O₃HTCC, laser processing, micro milling, hybrid processing

CLC Number:

TG54
V261

WANG Ziming, HOU Qingjian, XU Lijiang, WANG Yuefei, XIAO He, CHEN Ni, LI Liang. Fundamental Research on Laser-micro Milling Hybrid Processing of Alumina Co-fired Substrate[J]. Journal of Mechanical Engineering, 2024, 60(21): 397-406.

References

[1] SHAO Jinyu，FU Kun，LIU Yanan，et al. Fluorine-functionalized mesoporous alumina materials with superhydrophobic surfaces[J]. Surfaces and Interfaces，2023，40：103046.
[2] KAUNISTO K，LAGERBOM J，HONKANEN M，et al. Evolution of alumina phase structure in thermal plasma processing[J]. Ceramics International，2023，49(13)：21346-21354.
[3] LIU Dazhao，ZHANG Guangyuan，GUI Kaixuan，et al. Fabrication of strong and tough alumina ceramic with isotropic textured microstructure at low temperature[J]. Journal of Materials Research and Technology，2023，24：5159-5164.
[4] ROMANUS H，FERRARIS E，BOUQUET J，et al. Micromilling of sintered ZrO₂ ceramic via cBN and diamond coated tools[J]. Procedia CIRP，2014，14：371-376.
[5] KHODAII J，ADIBI H，BARAZANDEH F，et al. Investigation of the surface integrity，flexural strength on the grinding of alumina for biomedical application[J]. Precision Engineering，2021，67：110-122.
[6] HOLTHAUS M G，TWARDY S，STOLLE J，et al. Micromachining of ceramic surfaces：Hydroxyapatite and zirconia[J]. Journal of Materials Processing Technology，2012，212(3)：614-624.
[7] MENDES M，VILAR R. Influence of the processing parameters on the formation and deposition of particles in UV pulsed laser ablation of Al₂O₃–TiC ceramics[J]. Applied Surface Science，2003，217(1-4)：149-162.
[8] KUMAR M，VAISHYA R O，SURI N M，et al. An experimental investigation of surface characterization for zirconia ceramic using electrochemical discharge machining process[J]. Arabian Journal for Science and Engineering，2021，46：2269-2281.
[9] 张修峰，邵国栋，刘传成，等. 碳化硅陶瓷基复合材料常用的特种加工技术：综述[J]. 机械工程学报，2023，59(1)：199-218. ZHANG Xiufeng，SHAO Guodong，LIU Chuancheng，et al. Special processing techniques commonly used for silicon carbide ceramic-based composites：Review[J]. Journal of Mechanical Engineering，2023，59(1)：199-218.
[10] CLIJSTERS S，LIU K，REYNAERTS D，et al. EDM technology and strategy development for the manufacturing of complex parts in SiSiC [J]. Journal of Materials Processing Technology，2010，210(4)：631-641.
[11] KACAR E，MULTU M，AKMAN E，et al. Characterization of the drilling alumina ceramic using Nd：YAG pulsed laser[J]. Journal of Materials Processing Technology，2009，209(4)：2008-2014.
[12] HANON M M，AKMAN E，OZTOPRAK B G，et al. Experimental and theoretical investigation of the drilling of alumina ceramic using Nd：YAG pulsed laser[J]. Optics & Laser Technology，2012，44(4)：913-922.
[13] KIM S H，SOHN I B，JEONG S. Ablation characteristics of aluminum oxide and nitride ceramics during femtosecond laser micromachining[J]. Applied Surface Science，2009，255(24)：9717-9720.
[14] CAO Yang，ZHAO Biao，DING Wenfeng，et al. On the tool wear behavior during ultrasonic vibration-assisted form grinding with alumina wheels[J]. Ceramic International，2021，47(18)：26465-26474.
[15] LIU Yayun，WANG Chuanyang，LIU Tongshun. Effect of annealing on quality enhancement of micro-machining green alumina ceramics by laser ablation[J]. Ceramics International，2021，47(21)：30273-30286.
[16] MA Zhelun，WANG Qinghua，DONG Jinlong，et al. Experimental investigation and numerical analysis for machinability of alumina ceramic by laser-assisted grinding[J]. Precision Engineering，2021，72：798-806.
[17] KANNAN M V，KUPPAN P，KUMAR A S，et al. Effect of laser scan speed on surface temperature，cutting forces and tool wear during laser assisted machining of alumina[J]. Procedia Engineering，2014，97：1647-1656.
[18] IONIN A A，KLIMACHEV Y M，KOTKOV A A，et al. Carbon monoxide laser emitting nanosecond pulses with 10 MHz repetition rate[J]. Optics Communications，2009，282(2)：294-299.
[19] BEAUSOLEIL C，SARVESTANI，KATZ Z，et al. Deep and high precision cutting of alumina ceramics by picosecond laser[J]. Ceramics International，2020，46(10)：15285-15296.
[20] AUERKARI P. Mechanical and physical properties of engineering alumina ceramics[M]. Espoo：Technical Research Centre of Finland，1996.
[21] 陈妮，韦佳伟，张鑫磊，等. 激光改性后氮化铝基板的可加工性研究[J]. 中国机械工程，2021，32(23)：2817-2822. CHEN Ni，WEI Jiawei，ZHANG Xinlei，et al. Research on machinability of laser modified AlN substrate[J]. China Mechanical Engineering，2021，32(23)：2817-2822.
[22] SAMANT A N，DAHOTRE N B，Differences in physical phenomena governing laser machining of structure ceramics[J]. Ceramics International，2009，35：2093-2097.
[23] 赵万芹，梅雪松，杨子轩. 激光加工电子陶瓷基板孔的形貌特征及其工艺调控综述[J]. 中国激光，2022，49(10)：37-65. ZHAO Wanqin，MEI Xuesong，YANG Zixuan. A review on the morphological characteristics of laser-machined holes in electronic ceramic substrates and their process regulation[J]. Chinese Journal of Lasers，2022，49(10)：37-65.
[24] ZHAO Guolong， SONG Jichao， NIAN Zhiwen， et al. An improved time-varying stability analysis of micro milling considering tool wear[J]. Journal of Manufacturing Processes， 2022，84：1217-1228.