Study on the Influence of Temperature Distribution in the Optical Elements on the Surface Shape and Its Control Method during Full Aperture Polishing

doi:10.3901/JME.2022.15.046

Abstract

Abstract: Large aperture planar optical elements, especially the materials with large thermal expansion coefficient, are easily affected by temperature in full aperture polishing, which makes the surface shape accuracy difficult to control.The finite element model of the thermal-flow field of the optical element in the polishing process is established, and the influence of air and slurry on the temperature distribution of the top and bottom surfaces of the optical element in the full aperture polishing process are analyzed.Based on the theory of contact mechanics and finite element method, the contact mechanics model of optical element and polishing lap is established, and the influence of element deformation on polishing pressure distribution is analyzed.Based on Preston's equation, the influence of pressure distribution on the surface material removal distribution and surface shape accuracy is explored.A method to control the temperature distribution in the element and improve the surface shape accuracy of the element is proposed.The results show that for the K9 element with 610 mm aperture, the low frequency surface shape precision, PV can reach 0.2 λ(1λ=0.632 8 μm).

Key words: full-aperture polishing, multi physical field, low frequency surface shape, optical elements

CLC Number:

TG356

ZHANG Feihu, WANG Yiren, LIAO Defeng, REN Lele, LI Chen. Study on the Influence of Temperature Distribution in the Optical Elements on the Surface Shape and Its Control Method during Full Aperture Polishing[J]. Journal of Mechanical Engineering, 2022, 58(15): 46-54.

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