Preparation and Characterization of Ti2AlN Films

doi:10.3901/JME.2019.16.077

Abstract

Abstract: Ti₂AlN has been focused by many researchers for its excellent properties, however, the research on fabrication and properties of the Ti₂AlN film is little. Multi-arc ion plating and subsequent vacuum annealing are used to prepare the Ti₂AlN film, and the corrosion resistance and high temperature oxidation resistance of the film are tested and analyzed. The results show that the Ti₂AlN film which possessed better corrosion resistance and high temperature oxidation resistance compared with TiN film can be obtained under the optimized process. The anti-oxidation limit of Ti₂AlN film is 800℃ compared with 500℃ of TiN film, the continuous and dense Al₂O₃ formed on the surface of Ti₂AlN film is the main reason for higher anti-oxidation property. The larger thermal stress between the substrate and the oxide layer when the temperature exceeded 800℃ accelerate the stripping of the oxide layer. Ti₂AlN film with excellent corrosion resistance and high temperature oxidation resistance could be fabricated by multi-arc ion plating and vacuum annealing process, which can provide the theoretical support for the study of Ti₂AlN film.

Key words: contact angle, friction resistance coefficient, pressure drop, resistance reduction rate, hydrophobic micro pin fins, high temperature oxidation resistance, multi-arc ion plating, orthogonal test, Ti₂AlN films

CLC Number:

TG174
TG148

LIU Kexin, WANG Lei, LIU Jialei, JIN Songzhe. Preparation and Characterization of Ti₂AlN Films[J]. Journal of Mechanical Engineering, 2019, 55(16): 77-84.

References

[1] NAGHIBI S A,RAEISSI K,FATHI M. Corrosion and tribocorrosion behavior of Ti/TiN PVD coating on 316L stain-less steel substrate in Ringer's solution[J]. Materials Chemistry and Physics,2014,148(3):614-623.
[2] DUCK A,GAMER N,GESATZKE W,et al. Ti/TiN multilayer coatings:deposition technique,characterization and mechanical properties[J]. Surface & Coatings Technology,2001,142-144(1):579-584.
[3] MA S L,XU J,JIE W Q,et al. Characterization of microstructure and hardness of PCVD deposited Ti1-xAlxN hard Coatings[J]. Acta Metallurgica Sinica,2004,40(6):669-672.
[4] 邱龙时,乔关林,马飞,等. TiN薄膜的残余应力调控及力学性能研究[J]. 机械工程学报,2017,53(24):42-48. QIU Longshi,QIAO Guanlin,MA Fei,et al. Study on residual stress modulation and mechanical properties of titanium nitride coatings[J]. Journal of Mechanical Engineering,2017,53(24):42-48.
[5] ZHOU D P,HUI P,ZHU L,et al. Microstructure,hardness and corrosion behavior of Ti/TiN multilayer coatings produced by plasma activated EB-PVD[J]. Surface & Coatings Technology,2014,258:102-107.
[6] ZHAO S L,ZHANG J,CHEN W H,et al. High temperature oxidation resistance of Ti-Al-Zr-Cr-N composite films on cemented carbide substrates[J]. Rare Metal Materials and Engineering,2014,43(2):341-345.
[7] 施云芬,张世龙,王嘉浩,等. 牺牲阳极防腐材料的研究进展[J]. 东北电力大学学报,2017,37(4):80-85. SHI Yunfen,ZHANG Shilong,WANG Jiahao,et al. The research progress of sacrificial anode materials[J]. Journal of Northeast Dianli University,2017,37(4):80-85.
[8] 徐志明,白文玉,刘坐东,等. Ni-P改性表面铁细菌污垢和腐蚀特性实验研究[J]. 东北电力大学学报,2016,36(2):57-61. XU Zhiming,BAI Wenyu,LIU Zuodong,et al. Iron bacteria fouling and corrosion properties effect on modified surface of elec-troless Ni-P coating[J]. Journal of Northeast Dianli University,2016,36(2):57-61.
[9] 雍青松,王海斗,徐滨士,等. 类金刚石薄膜摩擦机理及其摩擦学性能影响因素的研究现状[J]. 机械工程学报,2016,52(11):95-107. YONG Qingsong,WANG Haidou,XU Binshi,et al. Research status of the tribological property of diamond-like carbon films[J]. Journal of Mechanical Engineering,2016,52(11):95-107.
[10] 张改梅,王灿,宋晓利,等. 纳米多孔氧化硅薄膜的表征及其基于UAFM弹性性能的检测[J]. 机械工程学报,2018,54(12):109-114. ZHANG Gaimei,WANG Can,SONG Xiaoli,et al. Characterization and measurement of elastic modulus based on ultrasonic atomic force microscopy for nano-porous silicon oxide film[J]. Journal of Mechanical Engineering,2018,54(12):109-114.
[11] XU J,LI Z Y,XIE Z H,et al. Uniting superhardness and damage-tolerance in a nanosandwich-structured Ti-B-N coating[J]. Scripta Materialia,2014,74(74):88-91.
[12] SHAO A L,CHENG Y,ZHOU Y,et al. Electrochemistry properties of multilayer TiN/Ti coatings on NiTi alloy for cardiac occluder application[J]. Surface & Coatings Technology,2013,228:S257-S261.
[13] REN X Y,PENG Z J,HU Y B,et al. Abrasive wear behavior of TiCN cermets under water-based slurries with different abrasives[J]. Tribology International,2013,66(7):35-43.
[14] ZHAO S L,ZHANG J,LIU C Multicomponent(Ti,Al,Zr,Cr)N films deposited on cemented carbide by multi-arc ion plating technology[J]. Heat Treatment of Metals,2009,34(9):15-20.
[15] FU Z Q,WANG C B,LI J L,et al. Influence of substrate bias voltage on (Ti,Cr)N films fabricated by vacuum cathodic arc deposition[J]. Rare Metal Materials and Engineering,2010,39(1):316-319.
[16] BARSOUM M W,El-RAGHY T,ALI M. Processing and characterization of Ti₂AlC,Ti₂AlN,and Ti₂AlC_0.5N_0.5[J]. Metallurgical and Materials Transactions A,2000,31(7):1857-1865.
[17] JORDAN J L,THADHANI N N.Effect of shock-activation on post-shock reaction synthesis of ternary ceramics[J]. Shock Compression of Condensed Matter,2007,27(5):1097-1100.
[18] LOW I M,PANG W K,KENNEDY S J,et al. High-temperature thermal stability of Ti₂AlN and Ti₄AlN₃:A comparative diffraction study[J]. Journal of The European Ceramic Society,2011,31(1):159-166.
[19] WANG Q M,GARKAS W,RENTERIA A F,et al. Oxidation behavior of Ti₂AlN films composed mainly of nanolaminated MAX phase[J]. J. Nanoscience and Nanotechnology,2011,11:1-8.
[20] JOELSSON T,HORLING A,BIRCH J,et al.Single-crystal Ti₂AlN thin films[J].Applied Physics Letters,2005,86(11):111913-3.
[21] KOLLER C M,HOLLERWEGER R,SABITZER C,et al. Thermal stability and oxidation resistance of arc evaporated TiAlN,TaAlN,TiAlTaN,and TiAlN/TaAlN coatings[J]. Surface and Coatings Technology,2014,259:599-607.
[22] 陈燕鸣,万强,蔡耀,等. 多弧离子镀制备TiN涂层的高温氧化行为分析[J]. 中南民族大学学报(自然科学版),2015,34(4):68-71. CHEN Yanming,WANG Qiang,CAI Yao,et al. Investigation on high temperature oxidation behavior of TiN coating by multi-arc ion plating[J]. Journal of South-Central University for Nationalities(Nat. Sci. Edition),2015,34(4):68-71.

Preparation and Characterization of Ti₂AlN Films

PDF

Knowledge

Abstract

Cite this article

share this article

References

Related Articles 15

Recommended Articles

Metrics

Comments

[1]	TIAN Yusi, JIAO Yonggang, SUN Huikai, LIU Bin, HAN Fei. Structural Optimization and Flow Characteristics of the Interrupted Microchannels [J]. Journal of Mechanical Engineering, 2023, 59(4): 274-282.
[2]	ZHENG Yiwen, WANG Jiankang, SUN Jiagang, HAO Liang. Design and Numerical Optimization of a New Layer-multiplying Element [J]. Journal of Mechanical Engineering, 2023, 59(22): 343-351.
[3]	WANG Lixin, ZHANG Shuoyan, YAN Shixing, DONG Shiyun. Numerical Simulation of Droplet Infiltration of Micro-nano Structure in Nepenthes Slippery Zone [J]. Journal of Mechanical Engineering, 2022, 58(3): 203-212.
[4]	CHEN Weiwei, SHI Wenze, LU Chao, CHENG Jinjie, CHEN Yao, CHEN Guo. Optimal Design of Spiral Coil EMAT for Online and Rapid Detection of High-temperature Forgings [J]. Journal of Mechanical Engineering, 2022, 58(10): 12-23.
[5]	GONG Dao, LIU Guangyu, ZHOU Jinsong, SUN Yu, YOU Taiwen. Research on Abnormal Vibration Issue of Car Bodies of EMU Trains and Its Treatment [J]. Journal of Mechanical Engineering, 2021, 57(10): 95-105,117.
[6]	LIU Wen, LI Huazheng, WANG Xue, WANG Shuli. Development of Flow Pattern and Pressure Drop in Gas-liquid Swirl Flow inside Horizontal Pipe [J]. Journal of Mechanical Engineering, 2020, 56(20): 214-222.
[7]	LI Zhen, GUAN Xianlei, ZHONG Rui, WANG Qingshan. Analysis of Dynamic Characteristics of Angle Contact Bearings with Combined Loads [J]. Journal of Mechanical Engineering, 2020, 56(17): 116-125.
[8]	YANG Songpeng,WU Kunyuan,SUN Chenghao,HUANG Hongmao,ZHANG Chuyan. Experimental Research on Influence of Special Climate Conditions on Hydrophobic Properties of Silicone Rubber [J]. Journal of Electrical Engineering, 2019, 14(2): 17-23.
[9]	QIAN Xiaohui, MA Xiaoyan, QIN Zhonghua, HOU Shaojing, XU Meihang, ZHANG Peng, ZHU Zian. Analysis of Glass Shell's Thermal Stress Based on Orthogonal Experiment [J]. Journal of Mechanical Engineering, 2019, 55(12): 91-98.
[10]	NIU Rongjun, XU Jinchao, SHAO Xiuhua, DENG sier. Mechanical Properties Analysis of Asymmetric Double Row Four-point-contact Slewing Bearing [J]. Journal of Mechanical Engineering, 2018, 54(9): 177-186.
[11]	LIU Hongpeng, YAN Rujing, WANG Yuzhong, WANG Qing. Research of Geometric Features Effect on the Wind Turbine Airfoil Roughness Sensitivity [J]. Journal of Mechanical Engineering, 2018, 54(14): 198-206.
[12]	CHEN Bo, GAO Dianrong, YANG Chao, WU Shaofeng, ZHANG Guangtong. Multi-objective Intelligent Collaborative Optimization of Structure Parameters for High-power Remote Sprayer [J]. Journal of Mechanical Engineering, 2017, 53(6): 166-175.
[13]	XIANG Qingchun, ZHANG Wei, QIU Keqiang, SUN Zhiguo, SUN Aixin, YANG Guixing. Casting Process Optimization for Large Lower Frame Body of Heavy Gyratory Crusher Based on DOE [J]. Journal of Mechanical Engineering, 2017, 53(6): 88-93.
[14]	DING Zhiping, HUANG Dayong, RONG Jigang, HUANG Youjian, ZENG Jiaxing. Predicting Method of Anisotropic Elastic Constants for Injection Molded Short Glass Fiber Reinforced Composites [J]. Journal of Mechanical Engineering, 2017, 53(24): 126-134.
[15]	YING Rui, YU Junzhi, WANG Weibing, ZHANG Ting, FENG Jingan, DU Sheng. Optimization of Structural and Process Parameters for Fine Particle Classifying Hydrocyclone [J]. Journal of Mechanical Engineering, 2017, 53(2): 124-134.