Progress in Surface Optical Functional Texture and Preparation of Crystalline Silicon Cells

doi:10.3901/JME.2019.09.166

Abstract

Abstract: Surface functional texture research has gradually developed into multidisciplinary cross-integrated design and manufacturing science issues. Crystalline silicon cells are the mainstream technology of solar photovoltaic power generation, and surface light functional texture can effectively improve the photoelectric conversion efficiency of crystalline silicon cells. Based on the function of optical functional texture of crystalline silicon cells, the types of surface texture of conventional crystalline silicon cells and their preparation methods are introduced. The bottleneck problems of optical functional texture directly on the surface of crystalline silicon cells are analyzed. The research status, difficulties and core problems of composite optical functional textured crystalline silicon cells are discussed. The development trend of optical functional texture preparation of high efficiency crystalline silicon cells is pointed out.

Key words: absorbance, crystalline silicon cell, micro-nano manufacturing, photovoltaic effect, surface texture

CLC Number:

F416

XU Zhilong, XU Xipeng, HUANG Hui, TAN Yuanqiang. Progress in Surface Optical Functional Texture and Preparation of Crystalline Silicon Cells[J]. Journal of Mechanical Engineering, 2019, 55(9): 166-175.

References

[1] 王静秋,王晓雷. 表面织构创新设计的研究回顾及展望[J]. 机械工程学报,2015,51(23):84-95. WANG Jingqiu,WANG Xiaolei. State of the art in innovative design of surface texture[J]. Journal of Mechanical Engineering,2015,51(23):84-95.
[2] 张辉,董光能,HUA Meng,等. 混合润滑状态下表面织构的建模和设计研究[J]. 机械工程学报,2018,54(3):168. ZHANG Hui,DONG Guangneng,HUA Meng,et al. Modeling and design of surface texture in mixed lubrication[J]. Journal of Mechanical Engineering,2018,54(3):168.
[3] 陈平,李俊玲,邵天敏,等. 考虑表面张力影响的表面织构最优参数分析[J]. 机械工程学报,2016,52(19):123-131. CHEN Ping,LI Junling,SHAO Tianmin,et al. Optimal analysis of geometric parameters of surface texture with surface tension considered[J]. Journal of Mechanical Engineering,2016,52(19):123-131.
[4] 郭东明,孙玉文,贾振元. 高性能精密制造方法及其研究进展[J]. 机械工程学报,2014,50(11):119-134. GUO Dongming,SUN Yuwen,JIA Zhenyuan. Methods and research progress of high performance manufacturing[J]. Journal of Mechanical Engineering,2014,50(11):119-134.
[5] 常秋英,齐烨,王斌,等. 激光表面织构对45钢干摩擦性能的影响[J]. 机械工程学报,2017,53(3):148-154. CHANG Qiuying,QI Ye,WANG Bin,et al. Tribological influence of laser surface textures on 45 steel under dry sliding[J]. Journal of Mechanical Engineering,2017,53(3):148-154.
[6] 汤勇,唐恒,万珍平,等. 超薄微热管的研究现状及发展趋势[J]. 机械工程学报,2017,53(20):131-144. TANG Yong,TANG Heng,WAN Zhenping,et al. Development status and perspective trend of ultra-thin micro heat pipe[J]. Journal of Mechanical Engineering,2017,53(20):131-144.
[7] 国家自然科学基金委员会工程与材料科学部. 机械工程学科发展战略报告(2011-2020)[M]. 北京:科学出版社,2010. National Natural Science Foundation of China,Department of Engineering and Materials Science. Mechanical engineering discipline development strategy report (2011-2020)[M]. Beijing:Science Press,2010.
[8] KORTE L,CONRAD E,ANGERMANN H,et al. Advances in a-Si:H/c-Si heterojunction solar cell fabrication and characterization[J]. Solar Energy Materials and Solar Cells,2009,93(6-7):905-910.
[9] JAY F,MUNOZ D,DESRUES T,et al. Advanced process for n-type mono-like silicon a-Si:H/c-Si heterojunction solar cells with 21.5% efficiency[J]. Solar Energy Materials and Solar Cells,2014,130:690-695.
[10] 孔伟金,曹凯华,由成龙,等. 太阳能电池用宽光谱减反射光栅的优化设计[J]. 光学学报,2013,33(12):35-39. KONG Weijin,CAO Kaihua,YOU Chenlong,et al. Optimization of wide spectrum anti-reflective grating for solar cell[J]. Acta Optica Sinica,2013,33(12):35-39.
[11] 杨德仁. 太阳电池材料[M]. 北京:化学工业出版社,2009. YANG Deren. Solar cell materials[M]. Beijing:Chemical Industry Press,2009.
[12] BU Y Y,CHEN S. Improved crystalline silicon solar cells by light harvesting zinc oxide nanowire arrays[J]. Optik - International Journal for Light and Electron Optics,2016,127(22):10355-10359.
[13] CAMPBELL P,GREEN M A. Light trapping properties of pyramidally textured surfaces[J]. Journal of Applied Physics,1987,62(1):243-249.
[14] LAL N N,WHITE T P,CATCHPOLE K R. Optics and light trapping for tandem solar cells on silicon[J]. IEEE Journal of Photovoltaics,2014,4(6):1380-1386.
[15] ESCARRE J,SÖDERSTRÖM K,DESPEISSE M,et al. Geometric light trapping for high efficiency thin film silicon solar cells[J]. Solar Energy Materials and Solar Cells,2012,98:185-190.
[16] GREEN M A,EMERY K,HISHIKAWA Y,et al. Solar cell efficiency tables (Version 45)[J]. Progress in Photovoltaics:Research and Applications,2015,23(1):1-9.
[17] STAPF A,HONEIT F,GONDEK C,et al. Texturing of monocrystalline silicon wafers by HF-HCl-H2O2 mixtures:Generation of random inverted pyramids and simulation of light trapping in PERC solar cells[J]. Solar Energy Materials and Solar Cells,2017,159:112-120.
[18] FATH P,BORST C,ZECHNER C,et al. Progress in a novel high-throughput mechanical texturization technology for highly efficient multicrystalline silicon solar cells[J]. Solar Energy Materials and Solar Cells,1997,48(1-4):229-236.
[19] CHO C,KIM H,JEONG S,et al. Random and V-groove texturing for efficient light trapping in organic photovoltaic cells[J]. Solar Energy Materials and Solar Cells,2013,115:36-41.
[20] NOSITSCHKA W A,VOIGT O,MANSHANDEN P,et al. Texturisation of multicrystalline silicon solar cells by RIE and plasma etching[J]. Solar Energy Materials and Solar Cells,2003,80(2):227-237.
[21] KHAN F,BAEK S H,KAUR J,et al. Paraboloid structured silicon surface for enhanced light absorption:experimental and simulative investigations[J]. Nanoscale Research Letters,2015,10(1):376.
[22] SEIDEL H,CSEPREGI L,HEUBERGER A,et al. Anisotropic etching of crystalline silicon in alkaline solutions I. Orientation dependence and behavior of passivation layers[J]. Journal of the Electrochemical Society,1990,137(11):3612-3626.
[23] 周春兰,王文静,赵雷,等. 单晶硅表面均匀小尺寸金字塔制备及其特性研究[J]. 物理学报,2010,59(8):5777-5783. ZHOU Chunlan,WANG Wenjing,ZHAO Lei,et al. Preparation and characterization of homogeneity and fine pyramids on the textured single silicon crystal[J]. Acta Physica Sinica,2010,59(8):5777-5783.
[24] KIM T,LIM J K,KYEONG D,et al. 21%-efficient PERL solar cells with plated front contacts on industrial 156 mm p-type crystalline silicon wafers[J]. Energy Procedia,2014,55:431-436.
[25] LI M,LI Y,LIU W,et al. Metal-assisted chemical etching for designable monocrystalline silicon nanostructure[J]. Materials Research Bulletin,2016,76:436-449.
[26] 周建忠,梅於芬,盛杰,等. 激光喷丸诱导镁合金表面微织构的电化学腐蚀性能[J]. 机械工程学报,2015,51(16):120-126. ZHOU Jianzhong,MEI Yufen,SHENG Jie,et al. Electrochemical corrosion behaviors of magnesium alloy micro-textured induced by laser peening[J]. Journal of Mechanical Engineering,2015,51(16):120-126.
[27] CHEN T G,YU P,CHEN S W,et al. Characteristics of large-scale nanohole arrays for thin-silicon photovoltaics[J]. Progress in Photovoltaics:Research and Applications,2014,22(4):452-461.
[28] SPINELLI P,NEWMAN B K,POLMAN A. Photovoltaics:Light-trapping in crystalline silicon and thin-film solar cells by nanostructured optical coatings[J]. Nanotechnology for Energy Sustainability,2017:163-180.
[29] YANG S,ZHANG L,GE P. Experimental study of the pyramidal texturization on the surface of photovoltaic silicon with cemented carbide micro-milling tool[J]. The International Journal of Advanced Manufacturing Technology,2017,92(9-12):3187-3196.
[30] 谢晋,李萍,吴可可,等. 微结构表面精密磨削技术及其功能特性开发[J]. 机械工程学报,2013,49(23):182-190. XIE Jin,LI Ping,WU Keke,et al. Micro and precision grinding technique and functional behavior development of micro-structured surfaces[J]. Journal of Mechanical Engineering,2017,92(9-12):3187-3196.
[31] 李连凯,余丙军,郭剑,等. 基于摩擦诱导选择性刻蚀原理的单晶硅表面大面积织构加工[J]. 机械工程学报,2014,50(17):93-98. LI Liankai,YU Bingjun,GUO Jian,et al. Fabrication of large scale texture on monocrystalline silicon surface based on friction-induced selective etching method[J]. Journal of Mechanical Engineering,2014,50(17):93-98.
[32] ZHAO J,WANG A,GREEN M A. 24.5% Efficiency silicon PERT cells on MCZ substrates and 24.7% efficiency PERL cells on FZ substrates[J]. Progress in Photovoltaics:Research and Applications,1999,7(6):471-474.
[33] DOBRZANSKI L A,DRYGALA A,GOLOMBEK K,et al. Laser surface treatment of multicrystalline silicon for enhancing optical properties[J]. Journal of Materials Processing Technology,2008,201(1-3):291-296.
[34] HONG L,WANG X C,ZHENG H Y,et al.Femtosecond laser fabrication of large-area periodic surface ripple structure on Si substrate[J]. Applied Surface Science,2014,297:134-138.
[35] BROCKETT T J,RAJAGOPALAN H,LAGHUMAVARAPU R B,et al. Electromagnetic characterization of high absorption sub-wavelength optical nanostructure photovoltaics for solar energy harvesting[J]. IEEE Transactions on Antennas and Propagation,2013,61(4):1518-1527.
[36] 靳聪慧,史振亮,于威,等. 晶体硅太阳能电池绒面的反应离子刻蚀制备研究[J]. 人工晶体学报,2015,44(3):571-575. JIN Conghui,SHI Zhenliang,YU Wei,et al. Fabrication of crystalline silicon surface texture for solar cells by reactive ion etching[J]. Journal of Synthetic Crystals,2015,44(3):571-575.
[37] YOO J,YU G,YI J. Large-area multi crystalline silicon solar cell fabrication using reactive ion etching[J]. Solar Energy Materials and Solar Cells,2011,95(1):2-6.
[38] NGUYEN K N,BASSET P,MARTY F,et al. On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching[J]. Journal of Applied Physics,2013,113(19):194903.
[39] TIAN B,LIEBER C M. Design synthesis and characterization of novel nanowire structures for photovoltaics and intracellular probes[J]. Pure and Applied Chemistry,2011,83(12):2153-2169.
[40] MURIAS D,REYES-BETANZO C,MORENO M,et al. Black Silicon formation using dry etching for solar cells applications[J]. Materials Science and Engineering:B,2012,177(16):1509-1513.
[41] 沈鸿烈,蒋晔. 基于倒金字塔减反射结构的多晶黑硅及其高效太阳电池[J]. 南京航空航天大学学报,2017,49(5):744-752. SHEN Honglie,JIANG Ye. Investigation on multi-crystalline black silicon and high efficiency solar cell based on inverted pyramid antireflective structure[J]. Journal of Nanjing University of Aeronautics & Astronautics,2017,49(5):744-752.
[42] 金磊,李玉芳,沈鸿烈,等. 反应离子刻蚀制备的多晶黑硅损伤去除与钝化性能研究[J]. 光学学报,2017,37(2):193-198. JIN Lei,LI Yufang,SHEN Honglie,et al. Damage- removal and passivation of polycrystalline black silicon by reactive ion etching[J]. Acta Optica Sinica,2017,37(2):193-198.
[43] PARK H,LEE J S,KWON S,et al. Effect of surface morphology on screen printed solar cells[J]. Current Applied Physics,2010,10(1):113-118.
[44] HAYASHI S,MINEMOTO T,TAKAKURA H,et al. Influence of texture feature size on spherical silicon solar cells[J]. Rare Metals,2006,25(6):115-120.
[45] KHANNA A,BASUA P K,FILIPOVIC A,et al. Influence of random pyramid surface texture on silver screen-printed contact formation for monocrystalline silicon wafer solar cells[J]. Solar Energy Materials and Solar Cells,2015,132:589-596.
[46] 徐嶺茂,高超,董鹏,等. 单晶硅片中的位错在快速热处理过程中的滑移[J]. 物理学报,2013,62(16):419-423. XU Lingmao,GAO Chao,DONG Peng,et al. Dislocation motion during rapid thermal processing of single-crystalline silicon wafers[J]. Acta Physica Sinica,2013,62(16):419-423.
[47] 辛超,周剑,周潘兵,等. 高温退火对铸造多晶硅片中位错密度的影响[J]. 半导体技术,2011,36(5):378-381. XIN Chao,ZHOU Jian,ZHOU Panbing,et al. Effect high temperature annealing on dislocation density of multicrystalline silicon wafers[J]. Semiconductor Technology,2011,36(5):378-381.
[48] EDWARDS M,BOWDEN S,DAS U,et al. Effect of texturing and surface preparation on lifetime and cell performance in heterojunction silicon solar cells[J].Solar Energy Materials and Solar Cells,2008,92(11):1373-1377.
[49] 龚洪勇,黄海宾,周浪. 晶体硅金字塔绒面结构圆化对其光反射率和非晶硅薄膜钝化效果的影响[J]. 人工晶体学报,2015,44(4):913-917. GONG Hongyong,HUANG Haibin,ZHOU Lang. Effects of rounding of pyramid texture on light reflectivity and amorphous silicon thin film passivation of crystalline silicon[J]. Journal of Synthetic Crystals,2015,44(4):913-917.
[50] RAHMAN A,ASHRAF A,XIN H,et al. Sub-50-nm self-assembled nanotextures for enhanced broadband antireflection in silicon solar cells[J]. Nature Communications,2015,6:5963.
[51] 许志龙,杨小璠,黄种明,等. 光面晶体硅-陷光膜复合电池光电特性研究[J]. 太阳能学报,2017,38(12):3265-3270. XU Zhilong,YANG Xiaofan,HUANG Zhongming,et al. Research of photoelectric characteristics of crystalline silicon composite cell with smooth surface and light trapping film[J]. Acta Energiae Solaris Sinica,2017,38(12):3265-3270.
[52] KE W C,LEE S J,CHEN S L,et al. Influence of the molybdenum thickness on the conversion efficiency of thin-film a-Si:H solar cells grown on a 304 stainless steel substrate[J]. Surface and Coatings Technology,2013,231:285-288.
[53] 程轲,王书杰,付冬伟,等. 单晶硅表面周期性微结构的减反射特性及光伏特性[J]. 高等学校化学学报,2010,31(8):1647-1650. CHENG Ke,WANG Shujie,FU Dongwei,et al. Antireflection and photovoltaic properties of microstructures design on the single crystalline silion surface[J]. Chemical Journal of Chinese Universities,2010,31(8):1647-1650.
[54] 丁武昌. 光管理在晶体硅电池中的应用[J]. 中国光学,2013,6(5):717-728. DING Wuchang. Light management in crystalline silicon solar cells[J]. Chinese Optics,2013,6(5):717-728.
[55] POTYRAILO R A,GHIRADELLA H,VERTIATCHIKH A,et al. Morpho butterfly wing scales demonstrate highly selective vapour response[J]. Nature Photonics,2007,1(2):123.
[56] MIN W L,AMAURY P B,JIANG P,et al. Bioinspired broadband antireflection coatings on GaSb[J]. Applied Physical Letter,2008,92:141109-141111.
[57] MUELLER T,SCHWERTHEIM S,FAHRNER W R. Crystalline silicon surface passivation by high-frequency plasma-enhanced chemical-vapor-deposited nanocomposite silicon suboxides for solar cell applications[J]. Journal of Applied Physics,2010,107(1):014504.
[58] RAFI J M,ZABALA M,BELDARRAIN O,et al. Deposition temperature and thermal annealing effects on the electrical characteristics of atomic layer deposited Al₂O₃ films on silicon[J]. Journal of the Electrochemical Society,2011,158(5):G108-G114.
[59] DINGEMANS G,KESSELS W M M. Status and prospects of Al₂O₃-based surface passivation schemes for silicon solar cells[J]. Journal of Vacuum Science & Technology A:Vacuum,Surfaces,and Films,2012,30(4):040802.
[60] 何悦,窦亚楠,马晓光,等. 热原子层沉积氧化铝对硅的钝化性能及热稳定性[J]. 物理学报,2012,61(24):520-524. HE Yue,DOU Yanan,MA Xiaoguang,et al. Passivation and stability of thermal atomic layer deposited Al₂O₃ on CZ-Si[J]. Acta Physica Sinica,2012,61(24):520-524.
[61] HAN K S,LEE H,KIM D,et al.Fabrication of anti-reflection structure on protective layer of solar cells by hot-embossing method[J]. Solar Energy Materials & Solar Cells,2009,93(8):1214-1217.
[62] AMALATHAS A P,ALKAISI M M. Efficient light trapping nanopyramid structures for solar cells patterned using UV nanoimprint lithography[J]. Materials Science in Semiconductor Processing,2017,57:54-58.
[63] JIAO Fang,HUANG Qiyu,REN Wangchun,et al. Enhanced performance for solar cells with moth-eye structure fabricated by UV nanoimprint lithography[J]. Microelectronic Engineering,2013,103(8):126-130.
[64] MASUKO K,SHIGEMATSU M,HASHIGUCHI T,et al. Achievement of more than 25% conversion efficiency with crystalline silicon heterojunction solar cell[J]. IEEE Journal of Photovoltaics,2014,4(6):1433-1435.
[65] YOSHIKAWA K,KAWASAKI H,YOSHIDA W,et al. Silicon heterojunction solar cell with interdigitated back contacts for a photoconversion efficiency over 26%[J]. Nature Energy,2017,2:17032.