Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method

doi:10.3901/JME.2018.02.117

Abstract

Abstract: Ti metal film with the same thickness has been deposited on glass substrate by magnetron sputtering method with different sputtering power. In order to study the influence mechanism of sputtering power on the structure and mechanical properties, surface morphology, phase structure and mechanical properties of films is studied by using atomic force microscope, X-ray diffractometer, nanoindentation, nano-impact system and electronic film stress distribution tester. The results show that with the increasing of sputtering power, the grain size and roughness increases with the sputtering power exponentially. The intensity of preferred orientation and hardness is slight increasing with the increasing of sputtering power. A lower sputtering power tend to produce higher ductility and resistance to fatigue fracture. The results also show that fatigue fracture life affected by residual stress Seriously, and the film with the biggest residual stress has the the shortest fatigue life. By analyzing the result, we know that sputtering power influences the energy of Ti radical, Ar ion-cluster and target material atoms firstly and further affects the microstructure and residual stress of the film. The hardness is mainly depended by the degree of grain preferential orientation.The residual tensile stress increases will promote the nucleation and growth of cracks, reduce the fracture toughness of thin films and shorten the fatigue life; nano-impact testing results show that with the sputtering power increasing, the film breaking form by plastic deformation to brittle fracture, which transformed from ductile to brittle film.

Key words: impact fatigue fracture resistance, indentation plasticity, residual stress, sputtering power, Ti film

CLC Number:

TG133

JIN Qiaoling, WANG Haidou, LI Guolu, ZHANG Jianjun, LIU Jinna. Effect of Sputtering Power on the Mechanical Properties of Ti Film Based on the Nano Indentation Method and Nano Impact Method[J]. Journal of Mechanical Engineering, 2018, 54(2): 117-124.

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