Effects of Translational Movement on Surface Planarity in Magnetorheological Planarization Process

doi:10.3901/JME.2017.01.206

Abstract

Abstract: To improve surface planarity, a reciprocate motion is integrated into the magnetorheoloigcal planarization process. A trajectory equation to describe the relative motion between the workpiece and the magnetorheological polishing tool is established, based on which a mathematical model for removal depth calculation is constructed. Effects of process parameters, such as trajectory type, reciprocate stroke and velocity, on surface planarity are explored. A simulation study is conducted on Matlab software. Some finishing experiments are carried out as well. The results show that surface planarity is well improved when the workpiece reciprocates only along the direction across air gap. Surface planarity decreases with the increase in reciprocate stoke but is slightly affected by reciprocate velocity. Using the magnetorheoloigcal planarization process with integrated translational movement, an ultra-smooth surface with planarity of micron scale and roughness of sub-nanometer scale is achieved on a K9 optical glass.

Key words: surface planarity, translational movement, magnetorheological planarization

WANG Yongqiang, YIN Shaohui, LI Yepeng, HU Tian, CHEN Fengjun. Effects of Translational Movement on Surface Planarity in Magnetorheological Planarization Process[J]. Journal of Mechanical Engineering, 2017, 53(1): 206-212.

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