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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Characterization and Measurement of Elastic Modulus Based on Ultrasonic Atomic Force Microscopy for Nano-porous Silicon Oxide Film
ZHANG Gaimei, WANG Can, SONG Xiaoli, HE Cunfu, CHEN Qiang
Journal of Mechanical Engineering . 2018, (
12
): 109 -114 . DOI: 10.3901/JME.2018.12.109
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