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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Monte Carlo Simulation of Multiple Masking Processes for Anisotropic Wet Etching
XING Yan;ZHU Peng;NI Zhonghua;TANG Wencheng
. 2009, (
1
): 239 -243 .
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