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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Theoretical Analysis and Pre-compensation Simulation of Pattern Distortion in Proximity UV-lithography
LI Mujun;SHEN Lianguan;LI Xiaoguang;ZHAO Wei;LIU Liting;ZHENG Jinjin
. 2008, (
11
): 69 -74 .
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