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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Numerical Study on the Mixed Soft Elastohydrodynamic Lubrication Behavior of ECMP Pad
ZHOU Ping;GUO Dongming;KANG Renke;JIN Zhuji
. 2012, (
7
): 180 -185 .
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