• CN: 11-2187/TH
  • ISSN: 0577-6686
Modeling of Flexible Composite Mold for Nanoimprint Lithography
LI Yanqiang, LAN Hongbo, XU Quan, LIANG Sen, LIU Hongzhong
Journal of Mechanical Engineering . 2018, (19): 170 -181 .  DOI: 10.3901/JME.2018.19.170