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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Hybrid Evolutionary–Metropolis Monte Carlo Algorithm for Wet Etching of Silicon MEMS Fabrication Process
WANG Shuqiao;XING Yan;TIAN Mi;QIU Xiaoli;QI Jianchang
. 2013, (
5
): 167 -172 .
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