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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
FUTURE DEVELOPMENT ON WAFER PLANARIZATION TECHNOLOGY IN ULSI FABRICATION
Guo Dongming;Kang Renke;Su Jianxiu;Jin Zhuji
. 2003, (
10
): 100 -105 .
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