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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Key Techniques of Micromanipulation Devices for MEMS Assembling and Packaging
SUN Lining;CHEN Liguo;RONG Weibin;XIE Hui;LIU Yanjie
. 2008, (
11
): 13 -19 .
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