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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Development of a Two-dimensional Ultrasonic Vibration Assisted Grinding Technique of Monocrystal Silicon
LIANG Zhiqiang;WANG Xibin;WU Yongbo;ZHAO Wenxiang;PENG Yunfeng;XU Weixing
. 2010, (
13
): 192 -198 .
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