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CN: 11-2187/TH
ISSN: 0577-6686
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JME College
中文
Development of a MEMS Electrical Inertia Micro-switch Based on Non-silicon Substrate
CAI Haogang;YANG Zhuoqing;DING Guifu;LIU Rui
. 2009, (
3
): 156 -161 .
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